Line scan sequential lateral solidification of thin films

ABSTRACT

A system for preparing a semiconductor film, the system including: a laser source; optics to form a line beam, a stage to support a sample capable of translation; memory for storing a set of instructions, the instructions including irradiating a first region of the film with a first laser pulse to form a first molten zone, said first molten zone having a maximum width (W max ) and a minimum width (W min ), wherein the first molten zone crystallizes to form laterally grown crystals; laterally moving the film in the direction of lateral growth a distance greater than about one-half W max  and less than W min ; and irradiating a second region of the film with a second laser pulse to form a second molten zone, wherein the second molten zone crystallizes to form laterally grown crystals that are elongations of the crystals in the first region, wherein laser optics provide W max  less than 2×W min .

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of and claims the benefit under 35 USC §120 of U.S. Pat. No. 8,221,544, issued on Jul. 17, 2012, entitled “Line Scan Sequential Lateral Solidification of Thin Films,” which claims the benefit under 35 USC §119(e) of U.S. Provisional Patent Application No. 60/668,934, filed on Apr. 6, 2005, entitled “Line Scan Sequential Lateral Solidification of Thin Films,” the contents of which are herein incorporated by reference in their entirety.

FIELD OF THE INVENTION

This invention relates to processing for thin film materials, and more particularly to forming crystalline thin films from amorphous or polycrystalline thin films using a line beam laser irradiation. In particular, the present disclosure relates to systems and methods for processing thin films to obtain substantial performance uniformity of thin film transistors (“TFTs”) situated therein.

BACKGROUND OF THE INVENTION

In recent years, various techniques for crystallizing or improving the crystallinity of an amorphous or polycrystalline semiconductor film have been investigated. This technology is used in the manufacture of a variety of devices, such as image sensors and active-matrix liquid crystal display (AM-LCD) devices. A regular array of thin-film transistors (TFTs) is fabricated on an appropriate substrate and each transistor serves as a pixel controller.

Crystalline semiconductor films, such as silicon films, provide pixels for liquid crystal displays. Such films have been processed by irradiation by an excimer laser followed by crystallization in excimer laser annealing (“ELA”) processes. Other more advantageous methods and systems, such as sequential lateral solidification (“SLS”) techniques, for processing semiconductor thin films for use in liquid crystal displays and organic light emitting diode (“OLED”) displays have been described. SLS is a pulsed-laser crystallization process that can produce crystalline films on substrates, including substrates that are intolerant to heat such as glass and plastics.

SLS uses controlled laser pulses to melt a region of an amorphous or polycrystalline thin film on a substrate. The melted region of film then laterally crystallizes into a directionally solidified lateral columnar microstructure or a location-controlled large single crystal region. Generally the melt/crystallization process is sequentially repeated over the surface of a large thin film large, with a large number of laser pulses. The processed film on substrate is then used to produce either one display, or even divided to produce multiple displays.

However, conventional ELA and SLS techniques are limited by variation in the laser pulses from one shot to the next. Each laser pulse used to melt a region of film typically has a different energy fluence than other laser pulses used to melt other regions of film. In turn, this can cause slightly different performance in the regions of recrystallized film across the area of the display. For example, during the sequential irradiation of neighboring regions of the thin film, a first region is irradiated by a first laser pulse having a first energy fluence; a second region is irradiated by a second laser pulse having a second fluence which is at least slightly different from that of the first laser pulse; and a third region is irradiated by a third laser pulse having a third fluence that is at least slightly different from that of the first and second laser pulses. The resulting energy densities of the irradiated and crystallized first, second and third regions of the semiconductor film are all, at least to some extent, different from one another due to the varying fluences of the sequential beam pulses irradiating neighboring regions

Variations in the fluence and/or energy density of the laser pulses, which melt regions of film, can cause variations in the quality and performance of the crystallized regions. When thin film transistor (“TFT”) devices are subsequently fabricated in such areas that have been irradiated and crystallized by laser beam pulses of different energy fluences and/or energy densities, performance differences may be detected. This may manifest itself in that the same colors provided on neighboring pixels of the display may appear different from one another. Another consequence of non-uniform irradiation of neighboring regions of the thin film is that a transition between pixels in one of these regions to pixels in the next consecutive region may be visible in the display produced from the film. This is due to the energy densities being different from one another in the two neighboring regions so that the transition between the regions at their borders has a contrast from one to the other.

SUMMARY OF THE INVENTION

Semiconductor film substrates are crystallized in a process that reduces the effect of differing energy fluences and energy densities of consecutive beam pulses on neighboring regions of a semiconductor film. The reduced effect provides films that can be used LCD and OLED displays that have greater uniformity and reduced sharpness in transition from adjacent crystallized regions.

In one aspect, a method of preparing a polycrystalline film includes (a) providing a substrate having a thin film disposed thereon, said film capable of laser-induced melting; (b) generating a sequence of laser pulses having a fluence that is sufficient to melt the film throughout its thickness in an irradiated region, each pulse forming a line beam having a length and width, said width sufficient to substantially prevent nucleation of solids in a portion of the thin film that is irradiated by the laser pulse; (c) irradiating a first region of the film with a first laser pulse to form a first molten zone, said first molten zone demonstrating a variation in width along its length to thereby define a maximum width (W_(max)) and a minimum width (W_(min)), wherein W_(max) is less than 2W_(min), and wherein the first molten zone crystallizes upon cooling to form one or more laterally grown crystals; (d) laterally moving the film in the direction of lateral growth a distance that is greater than about one-half W_(max) and less than W_(min); and (e) irradiating a second region of the film with a second laser pulse to form a second molten zone having a shape that is substantially the same as the shape of the first molten zone, wherein the second molten zone crystallizes upon cooling to form one or more laterally grown crystals that are elongations of the one or more crystals in the first region. In one or more embodiments, a width that is “sufficient to substantially prevent nucleation” is less than or equal to about twice the characteristic lateral growth length of the film under irradiation conditions.

In one or more embodiments, W_(max) is less than about 7 μm, or less than about 10 μm. The width of the molten zone varies by greater than 10% along its length, or varies up to 50% along its length. The length of the molten zone is in a range of about 10 mm to about 1000 mm.

In one or more embodiment, the molten zone has a length that is about as large as the width, or the length, of the substrate. In one or more embodiments, the molten zone has a length that is at least as large as one-half the width, or the length, of the substrate.

In one or more embodiments, steps (d) and (e) are repeated for a sufficient number of iterations to crystallize the film across the width, or the length, of the substrate in a single scan.

In another aspect, a method of preparing a polycrystalline film includes (a) providing a substrate having a thin film disposed thereon, said film capable of laser-induced melting; (b) generating a sequence of laser pulses having a fluence that is sufficient to melt the film throughout its thickness in an irradiated region, each pulse forming a line beam having a predetermined length and width; (c) irradiating a first region of the film with a first laser pulse to form a first molten zone, wherein the first molten zone is positioned at an angle relative to an edge of the substrate, and wherein the first molten zone of the film crystallizes upon cooling to form one or more laterally grown crystals; (d) laterally moving the film a distance substantially parallel to the edge of the substrate, said distance selected to provide overlap between the first laser pulse and a second laser pulse; (e) irradiating a second region of the film with a second laser pulse to form a second molten zone having a shape that is substantially the same as the first molten zone, wherein the second molten zone overlaps a portion of the laterally grown crystals of the first region, and wherein the second molten zone of the film crystallizes upon cooling to form one or more laterally grown crystals that are elongations of the one or more crystals in the first region.

In one or more embodiments, the angle is in the range of about 1-5 degrees, or about 1-20 degrees.

In one or more embodiments, the molten zone is positioned at an angle with respect to a position intended for a column of pixels in an active matrix display.

In one or more embodiment, the laterally grown crystals are oriented at an angle with respect to an edge of the substrate.

In one or more embodiment, the laser pulse width is selected to prevent nucleation of solids in a portion of the thin film that is irradiated by the laser pulse.

In one or more embodiment, the method further includes periodically interrupting lateral growth of the laterally grown crystals and initiating growth of a new set of laterally grown crystals. Lateral growth of the crystals is interrupted between about every 10 and 200 laser pulses, or between about every 20 and 400 microns of lateral repositioning of the film.

In another aspect, a method of preparing a polycrystalline film includes (a) providing a substrate having a thin film disposed thereon, said film capable of laser-induced melting; (b) generating a sequence of laser pulses, each pulse forming a line beam having a predetermined length and width and having a fluence that is sufficient to melt the film throughout its thickness in an irradiated region; (c) irradiating a first portion of the film with a plurality of laser pulses, wherein the irradiated film crystallizes after each laser pulse to form one or more laterally grown crystals and wherein the film is laterally moved a first distance relative to the laser pulses in the direction of lateral crystal growth after each laser pulse, to form a first crystalline region; and (d) without interruption of the film movement in the direction of the lateral crystal growth, irradiating a second portion of the film with a plurality of laser pulses, wherein the irradiated film crystallizes after each laser pulse to form one or more laterally grown crystals and wherein the film is laterally moved a second distance relative to the laser pulses in the direction of lateral crystal growth after each laser pulse, to form a second crystalline region, wherein said first distance is different from said second distance.

In one or more embodiments, the film alternates between moving a first translation distance and a second translation distance across regions of the substrate. Either the laser repetition rate or the sample translation speed can be varied to achieve the first and second translation distances.

In one or more embodiment, the first distance is selected to provide columns of laterally grown crystals having location controlled grain boundaries that interrupt lateral crystal growth and are substantially perpendicular to the direction of lateral growth. Each laser pulse forms a molten zone and the first distance is greater than one-half the width of the molten zone and less than the width of the molten zone.

In one or more embodiment, the molten zone demonstrates a variation in width along its length to thereby define a maximum width (W_(max)) and a minimum width (W_(min)), and the first distance is greater than about one-half W_(max) and less than W_(min).

In one or more embodiment, the second distance is selected to provide laterally grown crystals extending substantially in the direction of film movement. Each laser pulse forms a molten zone and the second distance is less than one-half the width of the molten zone.

In one or more embodiment, each laser pulse forms a molten zone and the first distance is greater than one-half the width of the molten zone and less than the width of the molten zone and the second distance is greater than one-half the width of the molten zone and less than the width of the molten zone.

In one or more embodiments, the first distance is selected to provide a first set of predetermined crystalline properties suitable for a channel region of a pixel TFT and/or the second distance is selected to provide a second set of predetermined crystalline properties suitable for a channel region of an integration TFT and/or the second portion is wide enough to accommodate a pair of integration regions for two adjacent displays.

In one or more embodiments, the line beam is formed by focusing the laser pulses into a shape of a desired dimension, and/or the laser pulse is focused into a line beam using cylindrical optics, and/or the line beam is further shaped using a shaping means selected from the group consisting of a mask, a slit or a straight edge.

In one or more embodiments, the line beam is formed using a shaping means selected from the group consisting of a mask, a slit or a straight edge and the mask defines the width and the length of the line beam or the slit defines the width of the line beam and the length of the line beam is defined by at least one optical element, or the straight edge defines a width of the shaped laser beam. The shaping means can have a length with non-linear features and/or the non-linear features are serrations.

In one or more embodiments, the line beam has a length to width aspect ratio of greater than 50, or a length to width aspect ratio of up to 2×10⁵.

In one or more embodiments, the molten zone has a width that is less than about 5 μm, or less than about 10 μm and/or the length of the molten zone is in a range of about 10 mm to about 1000 mm.

In another aspect, a system for preparing a semiconductor film for an active matrix display includes a laser source providing laser pulses having a pulse frequency of greater than about 4 kHz and having an average power of greater than 300 W; laser optics that shape the laser beam into a line beam, the shaped laser beam having a substantially uniform fluence along the length of the line beam; a stage for support of a sample capable of translation in at least one direction; and memory for storing a set of instructions; the instructions comprising:

(a) irradiating a first region of the film with a first laser pulse to form a first molten zone, said first molten zone demonstrating a variation in width along its length to thereby define a maximum width (W_(max)) and a minimum width (W_(min)), wherein the first molten zone crystallizes upon cooling to form one or more laterally grown crystals;

(b) laterally moving the film in the direction of lateral growth a distance that is greater than about one-half W_(max) and less than W_(min); and

(c) irradiating a second region of the film with a second laser pulse to form a second molten zone having a shape that is substantially the same as the shape of the first molten zone, wherein the second molten zone crystallizes upon cooling to form one or more laterally grown crystals that are elongations of the one or more crystals in the first region, where the system laser optics provide W_(max) less than 2W_(min).

In one or more embodiments, the line beam is positioned at an angle relative to a position intended for a column of TFTs, or the line beam is positioned at an angle relative to an edge of the substrate.

In another aspect, a system for preparing a semiconductor film for an active matrix display includes a laser source providing laser pulses having a pulse frequency of greater than about 4 kHz and having an average power of greater than 300 W; laser optics that shape the laser beam into an line beam, the shaped laser beam having a substantially uniform fluence along the length of the line beam; a stage for support of a sample capable of translation in at least one direction; and memory for storing a set of instructions; the instructions comprising:

(a) irradiating a first portion of the film with a plurality of laser pulses, wherein the irradiated film crystallizes after each laser pulse to form one or more laterally grown crystals and wherein the film is laterally moved a first distance in the direction of lateral crystal growth after each laser pulse, to form a first crystalline region having a first set of predetermined crystalline properties; and

(b) without interruption of the film movement in the direction of the lateral crystal growth, irradiating a second portion of the film with a plurality of laser pulses, wherein the irradiated film crystallizes after each laser pulse to form one or more laterally grown crystals and wherein the film is laterally moved a second distance in the direction of lateral crystal growth after each laser pulse, to form a second crystalline region having a second set of predetermined crystalline properties, wherein said first distance is different from said second distance.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention is described with reference to the following figures, which are presented for the purpose of illustration only and which are not intended to be limiting of the invention.

FIG. 1 illustrates a step in a line beam sequential lateral solidification to produce directional crystals according to one or more embodiments of the present invention.

FIG. 2 illustrates a step in a line beam sequential lateral solidification to produce directional crystals according to one or more embodiments of the present invention.

FIG. 3 illustrates a step in a line beam sequential lateral solidification to produce directional crystals according to one or more embodiments of the present invention.

FIG. 4A-FIG. 4D illustrate a line beam sequential lateral solidification process to produce uniform crystals according to one or more embodiments of the present invention.

FIG. 5 is a schematic illustration of a line beam pulse varying in width along its length.

FIG. 6A-6C illustrate a line beam sequential lateral solidification that overshoots the desired stepping distance according to a conventional sequential lateral solidification process.

FIGS. 7A and 7B illustrate a line beam sequential lateral solidification that undershoots the desired stepping distance according to a conventional sequential lateral solidification process.

FIGS. 8A and 8B illustrate a line beam sequential lateral solidification embodying a desired stepping distance according to one or more embodiments of the present invention.

FIG. 9 is a schematic illustration of a pulsed line beam laser crystallization process employing two or more pulse to pulse translation distances according to one or more embodiments of the present invention.

FIGS. 10A and 10B are schematic illustrations of a pulsed line beam laser crystallization process conducted at an angle with respect to the substrate according to one or more embodiments of the present invention.

FIG. 11 is a schematic illustration of a laser system for use in one or more embodiments of the present invention.

FIG. 12 is a cross-sectional illustration of a conventional AM-OLED.

DETAILED DESCRIPTION OF THE INVENTION

The crystallization of a thin film using a pulsed, narrow, elongated laser beam is described. The crystallization of a region of film following laser-induced melting is related to the characteristics of the laser pulse. In particular, the quality, size and shape of crystal grains in a crystallized region are determined by the energy, the spatial profile, and/or the temporal profile of the laser pulses that melt the region. Various irradiation schemes are described for polycrystalline substrates for use in display devices.

Pulse non-uniformities in an SLS system used to produce crystalline semiconductor films can arise from non-uniformities within a given laser pulse, as well as variations between successive pulses. For example, within a given laser pulse, the spatial energy density profile (e.g., uniformity of irradiation), the temporal intensity profile (e.g., pulse duration and/or temporal shape), and/or the imaging (e.g., field curvature and distortion) may vary. In addition, there are pulse-to-pulse fluctuations in the laser fluence, giving rise to variations in energy densities of sequential laser pulses. Gradual changes of these values within or between pulses can lead to gradual changes in one or more properties of the resulting crystallized region of thin film, for example in the microstructure of the crystallized semiconductor thin film. This can lead to gradual changes in the characteristics of TFT devices prepared on the crystallized film, and therefore gradual changes in brightness between neighboring pixels. In addition, abrupt changes in pixel brightness can be observed when one set of pixels is processed with a laser pulse having different irradiation characteristics than that of another set due to the pulse-to-pulse fluctuations of the laser beam energy.

A pulsed laser system and process of semiconductor thin film crystallization that employs a long, narrow beam can control at least some of the sources of non-uniformities in laser pulses and imaging so that concomitant non-uniformities are not observed in TFT devices prepared on the crystallized thin film. Defects or variation in the quality of the semiconductor film affect TFT device quality, and controlling the nature and the location of these film defects or variations can reduce their impact on the resulting TFT devices.

A conventional SLS system, as for example available from JSW, Japan, uses a two-dimensional (2-D) projection system to generate a rectangular laser pulse with a typical short axis dimension of ˜0.5-2.0 mm and a typical long axis dimension 15-30 mm. As these dimensions are not amenable to SLS, which requires at least one dimension to be on the order of the lateral grain growth, e.g., about 2-5 μm, the laser beam is masked to provide a plurality of beamlets of smaller dimension. The absolute changes in intensity etc. of the short axis are less than along the long axis. In addition, there is significant overlap, e.g., ˜50% overlap, in the direction of the short axis that helps to average out some of the non-uniformities. Thus, non-uniformities in the short dimension do not contribute greatly to differences in pixel brightness. However, non-uniformities in the long axis are more pronounced, and more detrimental. The long axis may be smaller than the dimension of the display so that it is unavoidable to have abrupt changes in pixel brightness from one scan to another. Furthermore, non-uniformities along the long axis may be on a scale that is very clearly visible to the human eye (e.g., a 10% brightness shift over 1 cm). While the eye is reasonably tolerant to random pixel-to-pixel variations and also to very large-scale (10s of cm) and gradual pixel-to-pixel variations, it is not very tolerant to abrupt changes between regions of a display or to small-scale (mms to cms) gradual fluctuations.

A line beam SLS process uses a one dimensional (1D) projection system to generate a long, highly aspected laser beam, typically on the order of 1-100 cm in length, e.g., a “line beam.” The length to width aspect ratio may be in the range of about 50 or more, for example up to 100, or 500, or 1000, or 2000, or 10000, or up to about 2×10⁵, or more for example. In one or more embodiments, width is the average width of W_(min) and W_(max). The length of the beam at its trailing edges may not be well defined in some embodiments of line beam SLS. For example, the energy may fluctuate and slowly drop off at the far ends of the length. The length of the line beam as referred to herein is the length of the line beam having a substantially uniform energy density, e.g., within 5% of the average energy density or fluence along the beam length. Alternatively, the length is the length of the line beam that is of sufficient energy density to perform the melt and solidification steps as described herein.

A thin film that is irradiated by a highly aspected (long) irradiation pattern can be fabricated into TFTs that provide a uniform pixel-to-pixel brightness because a single scan will crystallize an area large enough for the entire display. The beam length is preferably at least about the size of a single display, e.g., a liquid crystal or OLED display, or a multitude thereof or is preferably about the size of a substrate from which multiple displays can be produced. This is useful because it reduces or eliminates the appearance of any boundaries between irradiated regions of film. Any stitching artifacts that may arise when multiple scans across the film are needed, will generally not be visible within a given liquid crystal or OLED display. The beam length can be suitable for preparing substrates for cell phone displays, e.g., ˜2 inch diagonal for cell phones and ranging up to 10-16 inch diagonal for laptop displays (with aspect ratios of 2:3, 3:4 or other common ratios).

Crystallization with a long and narrow beam provides advantages when dealing with beams possessing inherent beam non-uniformities. For example, any non-uniformities along the long axis within a given laser pulse will be inherently gradual, and will be obscured over a distance much larger than the eye can detect. By making the long axis length substantially larger than the pixel size, or even larger than the size of the fabricated liquid crystal or OLED display, abrupt changes at the edge of a laser scan may not be apparent within a given fabricated display.

Crystallization with a long and narrow beam will additionally reduce the effect of any non-uniformities in the short axis, because each individual TFT device in the display lies within an area that may be crystallized with at least a few pulses. In other words, the scale of non-uniformity along the short axis is on a scale smaller than that of a single TFT device and therefore will not cause variations in pixel brightness. In addition, pulse-to-pulse fluctuations will become less relevant in the same way as in a conventional 2D SLS system.

An exemplary method using a line beam for SLS processing of a thin film is described with reference to FIG. 1 through FIG. 3. FIG. 1 shows a region 140 of a semiconductor film, e.g., an amorphous silicon film prior to “directional” crystallization, and an irradiating laser pulse in rectangular region 160. The laser pulse melts the film in region 160. The width of the melted region is referred to as the molten zone width (MZW). It should be noted that the laser irradiation region 160 is not drawn to scale in FIG. 1, and that the length of the region is much greater than the width, as is indicated by lines 145, 145′. This allows for a very long region of the film to be irradiated, for example, which is as long or longer than the length of a display that can be produced from the film. In some embodiments, the length of the laser irradiation region substantially spans several devices or even the width or length of the substrate. Using the appropriate laser source and optics, it is possible to generate a laser beam that is 1000 mm long, e.g., the dimension of a Gen 5 substrate, or even longer. In comparison, regions of film irradiated in earlier SLS techniques were on the order of or even smaller than the size of individual TFT devices of the display. In general, the width of the beam is sufficiently narrow that the fluence of laser irradiation is high enough to completely melt the irradiated region. In some embodiments, the width of the beam is sufficiently narrow to avoid nucleation in the crystals that subsequently grow in the melted region. The laser irradiation pattern, e.g., the image defined by the laser pulse, is spatially shaped using techniques described herein. For example, the pulse may be shaped by a mask or a slit. Alternatively, the pulse may be shaped using focusing optics.

After laser irradiation, the melted film begins to crystallize at the solid boundaries of region 160, and continues to crystallize inward towards centerline 180, forming crystals such as exemplary crystal 181. The distance the crystals grow, which is also referred to as the characteristic lateral growth length (characteristic “LGL”), is a function of the film composition, film thickness, the substrate temperature, the laser pulse characteristics, the buffer layer material, if any, and the mask configuration, etc., and can be defined as the LGL that occurs when growth is limited only by the occurrence of nucleation of solids in the supercooled liquid. For example, a typical characteristic lateral growth length for 50 nm thick silicon films is approximately 1-5 μm or about 2.5 μm. When growth is limited by other laterally growing fronts, as is the case here, where two fronts approach centerline 180, the LGL may be less than the characteristic LGL. In that case, the LGL is typically approximately one half the width of the molten zone.

The lateral crystallization results in “location-controlled growth” of grain boundaries and elongated crystals of a desired crystallographic orientation. Location-controlled growth referred to herein is defined as the controlled location of grains and grain boundaries using particular beam irradiation steps.

After the region 160 is irradiated and subsequently laterally crystallized, the silicon film can be advanced in the direction of crystal growth by a distance that is less than the lateral crystal growth length, e.g., not more than 90% of the lateral growth length. A subsequent laser pulse is then directed at a new area of the silicon film. For the fabrication of “directional” crystals, e.g., crystals having significant extension along a specific axis, the subsequent pulse preferably substantially overlaps with an area that has already been crystallized. By advancing the film a small distance, the crystals produced by earlier laser pulses act as seed crystals for subsequent crystallization of adjacent material. By repeating the process of advancing the film by small steps, and irradiating the film with a laser pulse at each step, crystals are made to grow laterally across the film, in the direction of the movement of the film relative to the laser pulse.

FIG. 2 shows the region 140 of the film after several iterations of moving the film and irradiating with laser pulses. As is clearly shown, an area 120 that has been irradiated by several pulses has formed elongated crystals that have grown in a direction substantially perpendicular to the length of the irradiation pattern. Substantially perpendicular means that a majority of lines formed by crystal boundaries 130 could be extended to intersect with dashed centerline 180.

FIG. 3 shows the region 140 of film after crystallization is almost complete. The crystals have continued to grow in the direction of the movement of the film relative to the irradiation region thereby forming a polycrystalline region. The film preferably continues to advance relative to irradiated regions, e.g., region 160 by substantially equal distances. Iterations of moving and irradiating the film are continued until the irradiated area reaches the edge of a polycrystalline region of the film.

By using a number of laser pulses to irradiate a region, i.e., a small translation distance of the film between laser pulses, a film having highly elongated, low defect-density grains can be produced. Such a grain structure is referred to as “directional” because the grains are oriented in a clearly discernable direction. For further details, see U.S. Pat. No. 6,322,625, the contents of which are incorporated herein in their entirety by reference.

According to the above-described method of sequential lateral solidification using high aspect ratio pulses, the entire sample area is crystallized using multiple pulses in a single lateral scan across the substrate. However, the continuous extension of crystal grains can result in the development of localized texture through the widening of crystal grains. Widening of crystal grains occurs as a result of competitive lateral growth between certain crystallographic orientations. Widened grains themselves start to develop many defects and the type (e.g., low-angle grain boundaries, twin boundaries or random high-angle grain boundaries) and density thereof may depend on the crystallographic orientation in the direction of growth. Each grain thus breaks down into a ‘family’ of grains that have comparable properties. These grain families can become very wide, for example wider than 10 μm or even wider than 50 μm depending on sample configuration and crystallization conditions. As TFT performance depends on both crystallographic orientation of the grains (e.g., through variation of the interface defect density as a function of surface orientation) as well as defect density of the grains, this localized texture can lead to large variation of TFT performance. Thus, it may be desired to interrupt grain growth from time to time or region to region so as to avoid formation of localized texture and the related regional variations in defect density.

In one or more embodiments, crystal structure can be further controlled by interrupting the series of pulses to deliberately discontinue the lateral growth in the direction of the scan. Thus, according to one or more embodiments, the laser irradiation projection onto the substrate surface is blocked and no melting and subsequent crystallization occurs. This results in an intermittent perpendicular grain boundary in the film so that a new set of seeds is created and a “fresh” set of grains start to grow. Interruption of grain growth can prevent excessive widening of grain-families or even localized texture, which may not be desired due to the different effects texture may have on TFT performance and thus pixel brightness. In one or more embodiments, lateral crystal growth is interrupted about every 10-200, or 10-100, pulses, or at a repeating distance of about 20-400, or 20-200, μm. Lateral crystal growth can be interrupted by periodically redirecting the laser beam away from the substrate surface or by positioning a beam block in the laser path for the duration of one or a few pulses. The locations of these perpendicular grain boundaries are well-known and carefully controlled by the process. Pixel and display processing can be designed so as to avoid these regions.

An alternative irradiation protocol, referred to herein as “uniform-grain sequential lateral solidification,” or “uniform SLS,” is used to prepare a uniform crystalline film characterized by repeating columns of laterally elongated crystals. The crystallization protocol involves advancing the film by an amount greater than the lateral growth length, e.g., δ>LGL, where δ is the translation distance between pulses, and less than two times the lateral growth length, e.g., δ<2 LGL. Uniform crystal growth is described with reference to FIGS. 4A-4C.

Referring to FIG. 4A, a first irradiation is carried out on a film with a narrow, e.g., less than two times the lateral growth length, and elongated, e.g., greater than 10 mm and up to or greater than 1000 mm, laser beam pulse having an energy density sufficient to completely melt the film. As a result, the film exposed to the laser beam (shown as region 400 in FIG. 4A), is melted completely and then crystallized. In this case, grains grow laterally from an interface 420 between the unirradiated region and the melted region. By selecting the laser pulse width so that the molten zone width is less than about two times the characteristic LGL, the grains growing from both solid/melt interfaces collide with one another approximately at the center of the melted region, e.g., at centerline 405, and the lateral growth stops. The two melt fronts collide approximately at the centerline 405 before the temperature of the melt becomes sufficiently low to trigger nucleation.

Referring to FIG. 4B, after being displaced by a predetermined distance δ that is at least greater than about LGL and less than at most two LGL, a second region of the substrate 400′ is irradiated with a second laser beam pulse. The displacement of the substrate, δ, is related to the desired degree of overlap of the laser beam pulse. As the displacement of the substrate becomes longer, the degree of overlap becomes less. It is advantageous and preferable to have the overlap degree of the laser beam to be less than about 90% and more than about 10% of the LGL. The overlap region is illustrated by brackets 430 and dashed line 435. The film region 400′ exposed to the second laser beam irradiation melts completely and crystallizes. In this case, the grains grown by the first irradiation pulse serve as crystallizing seeds for the lateral growth of the grains grown from the second irradiation pulse. FIG. 4C illustrates a region 440 having crystals that are laterally extended beyond a lateral growth length. Thus, a column of elongated crystals are formed by two laser beam irradiations on average. Because two irradiation pulses are all that is required to form the column of laterally extended crystals, the process is also referred to as a “two shot” process. Irradiation continues across the substrate to create multiple columns of laterally extended crystals. FIG. 4D illustrates the microstructure of the substrate after multiple irradiations and depicts several columns 440 of laterally extended crystals.

Thus, in uniform SLS, a film is irradiated and melted with a low number of pulses, e.g., two, which laterally overlap to a more limited extent than for a “directional” film. The crystals that form within the melted regions preferably grow laterally and with a similar orientation, and meet each other at a boundary within the particular irradiated region of film. The width of the irradiation pattern is preferably selected so that the crystals grow without nucleation. In such instances, the grains are not significantly elongated; however, they are of uniform size and orientation. For further details, see U.S. Pat. No. 6,573,531, the contents of which are incorporated herein in their entirety by reference.

In general, the film itself is not required to move during crystallization; the laser beam or a mask defining the laser beam shape could be scanned across the film instead to provide a relative motion of the irradiated region and the film. However, moving the film relative to the laser beam may provide improved uniformity of the laser beam during each subsequent irradiation event.

Unlike conventional 2D projection SLS, where the width of the molten zone is relatively invariant along its length, there are additional non-marginal sources of beam distortions in 1D projected line beam laser pulse. The molten zone width in a line scan SLS process can vary to a significant degree along the length of the irradiated region. The variation in the molten zone width is due to a number of factors, such as depth of focus limitations, edge blurring of the laser beam profile, pulse to pulse energy density variations, within sample thickness variations, substrate thickness variations, stage nonplanarities, refraction non-uniformities in the optical elements, imperfections in reflective optics, intensity deviations from ideal Gaussian short axis and Top-Hat long-axis raw beam profile, etc. These effects become more apparent along the length of the irradiated region due to the high aspect ratio of the beam in the length direction. Deviations from a target width are observed even in those instances when a mask is used to help shape the beam and to provide a sharp energy density profile. Deviations in width can be quite significant; variations in width along the length of +/−10% are common and variations of up to +/−50% have been reported.

This is illustrated schematically in FIG. 5, which depicts a planar/top view of a molten region 500 of a film after irradiation with a line beam laser pulse. The variation in width along the length has been exaggerated for purposes of illustration. The molten region includes long edges 510 and 510′ that demonstrate a variation in the beam pulse width. At its widest point, the molten region has a width W_(max). At its narrowest point, the molten region has a width W_(min). During crystallization, the crystals grow laterally from long edges 510, 510′ towards an imaginary centerline 520. The centerline is used as a measuring point because the laterally grown crystals from opposition sides of the melt region generally meet approximately at the centerline. The resultant laterally grown crystals can have significantly different length and will have for example, a length ranging from LGL_(max) corresponding to about one-half W_(max) to LGL_(min) corresponding to one-half W_(min).

Under such beam distortion conditions, the conventional step distance—greater than the average lateral growth length (“LGL_(avg)”) and less than two times the average lateral growth length (“2LGL_(avg)”) may not provide uniform grain structure. This is illustrated with reference to FIGS. 6A and 6B. In FIG. 6A, a laterally crystallized region 600 showing distortion in the molten zone width along the length is shown. The grains grow laterally until they meet at centerline 610, creating laterally grown crystals of different grain length. A crystal 620 has a maximum grain length, LGL_(max), which is indicated in FIG. 6A. A crystal 630 has a minimum grain length, LGL_(max), which is also indicated in FIG. 6A. If the sample is moved a distance that is, for example, more than LGL_(avg) and less than two times LGL_(avg), the second layer pulse may not completely overlap with the laterally grown crystals of region 600. Regions of the film are not irradiated, resulting in islands 670 of amorphous or low-quality crystalline material.

FIG. 6B shows a second irradiated region 600′ that is stepped from the first region a distance that is more than LGL_(avg) and less than two times LGL_(avg). The overlap between the two irradiated regions is indicated by bracket 650 and by dashed line 640. Region 670 is not irradiated by either the first or second irradiation pulse. Upon lateral solidification, as indicated in FIG. 6C, a region 660 having crystals that are laterally extended beyond a lateral growth length are formed, however, an amorphous or polycrystalline island 670 remains within region 660. If a TFT device were located over a portion of region 660 that includes the amorphous region 670, the performance of the TFT would be adversely affected. Thus, distortions in the beam width should be accounted for in determining the step distance for a two-shot process. In addition to the variations in the width of a single molten region, pulse-to-pulse variations, e.g., in focus or energy density, cause differences in width among molten regions. Thus, LGL_(min) and LGL_(max) may actually be even smaller or larger due to pulse-to-pulse variations and this increased range can be taken into account as well.

The above example describes a scenario where the second laser pulse “overshoots” the crystallized region 600, resulting in an unirradiated region 670. Another example of misalignment of the second laser pulse arises when the stepping distance is too small and the second pulse “undershoots” the crystallized region 700 so that a two shot process is not achieved in some locations. As illustrated in FIG. 7A, the laser pulse 700′ does not cross over centerline 710 along the entire length of region 700. The overlap region is indicated by bracket 705 and dashed line 710. In those portions where the second laser pulse 700′ does not pass over centerline 710, directional crystallization (and not uniform crystallization) results. In those portions where the second laser pulse 600′ passes over centerline 710, as is desired for a two step process, uniform crystallization results. FIG. 7B. illustrates the resultant crystallization grain structure.

In order to avoid such defects in the laser irradiation process and according to one or more embodiments of the invention, the sample is stepped a distance δ that is greater than about one half W_(max) and less than about W_(min), that is W_(max)<δ<2W_(min). As noted above, the resultant laterally grown crystals will vary. LGL_(max) is the longest lateral grain length in a region after irradiation and lateral crystallization and corresponds to one half W_(max). Similarly, LGL_(min) is the shortest lateral grain length in a region after irradiation and lateral crystallization and corresponds to W_(min). By defining the stepping distance in this manner, there is complete overlap from one irradiation act to the next and islands of unirradiated substrate are avoided. By requiring that δ be greater than one half W_(max), the second laser pulse is certain to cross the centerline of the laterally crystallized region (and to avoid the problems described above with reference to FIGS. 7A-B) and to thereby assure that only uniform grain growth occurs. By requiring that δ be less than W_(min), overstepping and gaps in irradiation giving rise to islands of amorphous material are avoided (as described above with reference to FIGS. 6A-C).

This is illustrated in FIGS. 8A and 8B, where the translational distance δ is selected to provide optimal overlap between first and second laser irradiation pulses. In FIG. 8A, crystals 815 and 818 are laterally grown from a molten region 800 having variation in the width along its length and giving rise to crystals of varying length. A crystal 820 has a maximum grain length, LGL_(max), which is indicated in FIG. 8A. A crystal 830 has a minimum grain length, LGL_(min), which is also indicated in FIG. 8A. The sample is moved a distance that is more than LGL_(max) and less than two times LGL_(min) (and also more than one half W_(max) and less than W_(min)). The overlap between first and second positions is indicated by bracket 840 and dashed line 850. The film region 860 that is exposed to the second laser beam irradiation is melted and crystallized. In this case, the grains grown by the first irradiation pulse serve as crystallizing seeds for the lateral growth along the entire length of laser pulse. FIG. 8B illustrates a region 870 having crystals that are laterally extended beyond a lateral growth length (and are all of substantially similar length). Thus, a column of elongated crystals of uniform LGL are formed by two laser beam irradiations on average and overshooting and undershooting or the stepping distance is avoided.

LGL_(max) and LGL_(min) are a function of the specific crystallization conditions for a particular set of laser conditions and substrate properties. Specific values for LGL_(max) and LGL_(min) can be determined empirically by conducting a controlled irradiation of a sample and measuring the variation lateral growth length, for example, by inspection of the resultant crystals at high magnification. Alternatively, the variation in beam width (and corresponding variation in lateral growth length) can be reasonably estimated using process models that define the effect of processing variables on crystallization. Processing variables such as film thickness, within film thickness variability, depth of focus limitations, pulse to pulse energy density variations, and the like can be input into a model that understands or defines how the individual and/or collective factors operate to affect the crystallization process. Models suitable for adaptation for this purpose have been previously described. See, Robert S. Sposili, Doctoral Dissertation, Chapter 8: “Mathematical Model of the SLS process”, Columbia University, 2001.

While the variation in beam width has a particularly noted effect on uniform grain growth, SLS processes for directional line beam SLS also may be designed with this variation in mind. Thus, the stepping distance in a directional SLS process should be less than LGL_(min). Because the stepping distances in directional grain growth are typically small, this requirement is met by most processing protocols.

In another aspect of the invention, the translation distance from pulse to pulse is varied as the laser is scanned across the substrate in order to obtain selected crystallization features in different regions of the film. In one or more embodiments, a film is subjected to line beam SLS crystallization in which at least two regions of the film are translated at different pulse to pulse translation distances.

For example, a first region of the film is subjected to line beam SLS crystallization while the film moves at a velocity to provide a pulse to pulse translation distance sufficient to produce a uniform crystal grain structure, e.g., LGL_(max)<δ<2LGL_(min), and a second region of the film is subjected to line beam SLS crystallization while the film moves at a velocity to provide a pulse to pulse translation distance sufficient to produce a directional crystal grain structure, e.g., δ<LGL_(min). The changes in pulse to pulse translation distances occur in a single scan across the substrate or portion of the substrate that is being crystallized.

By way of a further example, a first region of the film is subjected to line beam SLS crystallization while the film moves at a velocity to provide a first pulse to pulse translation distance sufficient to produce a directional crystal grain structure, and a second region of the film is subjected to line beam SLS crystallization while the film moves at a velocity to provide a second pulse to pulse translation distance sufficient to produce a directional crystal grain structure, wherein the first and second pulse to pulse translation distances are different. The laser repetition rate is typically constant. Alternatively, the substrate velocity is constant and the laser repetition rate is varied to alter the pulse to pulse translation distances in the two regions of the film.

The process is illustrated in FIG. 9. A film sample 900 is illuminated by a line beam laser pulse 910 as the film moves under the line beam laser pulse in the direction indicated by arrow 920. The sample is capable of moving at different rates so that the pulse to pulse translation distance can be varied. In other embodiments, the pulse to pulse translation distance is varied by varying the laser pulse frequency. As section 930 of film sample 900 moves under the laser line beam, the film moves at a first rate, for example, to provide a pulse to pulse translation distance suitable for obtaining uniform crystal growth. As section 940 of film sample 900 moves under the laser line beam, the film moves at a second rate, for example, to provide a pulse to pulse translation distance suitable for obtaining directional crystal growth. In this way, regions having different crystal structure can be formed in a single scan of a pulsed laser line beam across a section of the film. The section may be the entire length (L) of the film sample, or a portion thereof, e.g., L/2, L/4, etc.

It has been previously observed that film properties, such as electron mobility in a silicon film, degrade with increasing translation distance δ in the directional SLS regime where the translation distance is less than the lateral growth length. In a similar fashion, film properties differ between directionally grown and uniformly grown crystals. Directionally grown crystals typically exhibit superior film properties, however, this comes at the cost of reduced material throughput. By varying the pulse to pulse translation distances of the film as the laser scans across the selected region of the substrate, it is possible to maximize resources (e.g., laser energy) and increase throughput by irradiating each region using the maximum translation distance able to provide the desired film properties. The locations of these different crystalline regions are well-known and carefully controlled by the process. Pixel and display processing can be designed so as to place these devices in the appropriate crystalline region.

In another aspect, film regions having difference film properties are obtained by selectively pretreating film regions to impart desired film properties. The quality of the film is controlled by pre-crystallizing regions of the substrate using a texture inducing and grain-size enlarging process. Subsequently the precrystallized substrate is processed by SLS, e.g., uniform SLS, to obtain regions of different crystalline properties.

A textured film contains grains having predominantly the same crystallographic orientation in at least a single direction; however, they are randomly located on the surface and are of no particular size (microstructure). More specifically, if one crystallographic axis of most crystallites in a thin polycrystalline film points preferentially in a given direction, the texture is uni-axial texture. For the embodiments described herein, the preferential direction of the uni-axial texture is a direction normal to the surface of the crystallites. Thus, “texture” refers to a uni-axial surface texture of the grains as used herein. The degree of texture can vary depending upon the particular application. Crystallographic orientation is a <111> orientation or in another embodiment is a <100> orientation or in another embodiment crystallographic orientation includes <110> orientation. In another embodiment, different regions of the film include different crystallographic orientations.

Differences in crystal orientation however may lead to differences in device behavior. Uniformity can be improved by controlling the orientation of the grains that are grown in an SLS process. Because all the grains have the same crystallographic orientation within the treated region, TFT uniformity for a device(s) located within the region is improved. Devices can be selectively located in regions of selected orientation. For example, a higher degree of texture is preferable for a thin film transistor (TFT) being used for a driver circuit as opposed to a TFT that is used for a switch circuit.

In order to provide regions having different crystalline morphologies and different film properties, select regions of the film may be treated to introduce a selected texture and large grain size into regions of the film. Many texture-inducing methods lead to large grain size. Grains with a particular orientation grow at the expense of others thereby reducing the number of grains and increasing their average size. Conventional methods of obtaining a precursor textured film include zone melt recrystallization (ZMR), solid phase recrystallization, direct deposition techniques (chemical vapor deposition (CVD), sputtering, evaporation), surface-energy-driven secondary grain growth (SEDSGG) and pulsed laser crystallization (SLS, multiple-pulse ELA) methods. It is envisioned that other texture-inducing methods may also be used in a similar way to generate the textured precursors.

As is discussed in co-pending, co-owned U.S. application Ser. No. 10/994,205, entitled “Systems And Methods For Creating Crystallographic-Orientation Controlled Poly-Silicon Films,” incorporated herein by reference, orientation of the crystallized film may be obtained by first creating the desired texture in the film using established texturing techniques and then creating the desired crystalline microstructure using a selected SLS crystallization process.

A display is composed of a grid (or matrix) of picture elements (“pixels”). Thousands or millions of these pixels together create an image on the display. Thin film transistors (TFTs) act as switches to individually turn each pixel “on” (light) or “off” (dark). The TFTs are the active elements, arranged in a matrix, on the display. Currently, such active matrices require connections to external drive circuitry. Current development efforts are directed to integration of driver circuitry of the TFT onto the same semiconductor film. Driver circuitry typically has more stringent performance requirements, e.g., higher electron mobility, low leakage currents and threshold voltages, than that of the pixel TFT. The ability to alter the crystal grain structure of the silicon film by altering the translation distance in a line beam SLS process would allow developers to tailor a polycrystalline silicon film for specific integration and display applications.

In another aspect, the angle of crystallization is offset slightly from the edges of the substrate, e.g., display panel. When the line scan laser pulse is aligned with the edges of the display panel, there is a chance that columns of similarly bright pixels will result despite the averaging out of pulse-to-pulse fluctuations. In such cases, it may be desirable to slightly offset the direction of scan in order to create a tilted microstructure. Tilt is chosen such that TFT regions that are crystallized using the same series of laser pulses are spaced far apart. In one or more embodiments, a small tilt angle such as about 1-5°, or about 1-20°, is used.

FIG. 10A is a schematic illustration of a laser and sample arrangement for implementing surface crystallization at an angle. In one or more embodiments, a pulsed laser line beam 1000 is shaped at an angle θ with response to the substrate 1010. The length of the line beam, L_(lb), is selected to cover the entire selected section of the film sample, x. The relationship between the line beam length and the film sample section is L_(lb) cos θ=x. The sample moves in the direction indicated by arrow 1020. An exemplary crystal grain structure is shown in FIG. 10B.

The use of tilted grain boundaries is advantageous in uniform grain structures. While uniform crystallization provides location control of grain boundaries and periodic uniform grain structure, the periodicity is controlled only in the long dimension of the grains. However, the spacing between the short grain boundaries cannot be controlled. It may be desirable to locate TFTs on a silicon substrate at a tilt angle relative to the long dimension grain boundaries of a uniformly crystallized film. See, US 2005/0034653, entitled “Polycrystalline TFT Uniformity Through Microstructure Misalignment,” which is incorporated by reference. While this may be accomplished by tilting the TFT, TFT fabrication protocols makes this difficult. According to one or more embodiments, a periodic uniform grain structure at an angle with respect to the substrate edge is provided. TFTs can then be manufactured by conventional methods.

Directionally oriented crystals will also benefit from a deliberate tilt in the crystal orientation. Although a directionally oriented polycrystalline film does not have repeating long grain boundaries perpendicular to the direction of grain growth, as is observed for uniform polycrystalline materials, the film may nonetheless exhibit periodic variations in film properties, most notably, in film thickness. SLS crystallization results in an undulation or periodic variation in the film thickness and gives rise to high and low regions across a film area. Device properties are a function of film thickness, surface morphology, e.g., through variations in the electric field over the gate dielectric (and thus into the semiconductor film) as it is either convexly or concavely curved, and thickness variations of the gate dielectric resulting form morphology of the surface (e.g., during gate dielectric film deposition, better coverage may be achieve on planer regions than on sloped regions). Orienting the directional grains at an tilt angle with respect to the edge of the substrate and with respect to any TFT devices that may be fabricated in the film, serves to bridge each TFT device over regions of both high and low thickness and thereby average out any performance differences. Tilt engineering in directional SLS is also a way to avoid having multiple adjacent pixel TFTs to fall within the same ‘grain family.’ When the grains grow diagonally with respect to the pixel TFT array, one can imagine that a grain family intersects a TFT channel only one out of several TFTs.

A schematic illustration of a line scan crystallization system 200 using high aspect ratio pulses is shown in FIG. 11. The system includes a laser pulse source 202, operating for instance at 308 nm (XeCl) or 248 nm or 351 nm. A series of mirrors 206, 208, 210 direct the laser beam to a sample stage 212, which is capable of sub-micron precision in the x-, and z- (and optionally y-) directions. The system also includes slit 220 that may be used to control the spatial profile of the laser beam and energy density meter 216 to read the reflection of slit 220. Shutter 228 can be used to block the beam when no sample is present or no irradiation is desired. Sample 230 may be positioned on stage 212 for processing.

Laser-induced crystallization is typically accomplished by laser irradiation using a wavelength of energy that can be at least partially absorbed by the film, with an energy density, or fluence, high enough to melt the film. Although the film can be made of any material susceptible to melt and recrystallization, silicon is a preferred material for display applications. In one embodiment, the laser pulses generated by the source 202 have an energy in the range of 50-200 mJ/pulse and a pulse repetition rate around 4000 Hz or more. Excimer lasers currently available from Cymer, Inc. San Diego, Calif., can achieve this output. Although an excimer laser system is described, it is appreciated that other sources capable of providing laser pulses at least partially absorbable by a desired film may be used. For example, the laser source may be any conventional laser source, including but not limited to, excimer laser, continuous wave laser and solid-state laser. The irradiation beam pulse can be generated by another known source or short energy pulses suitable for melting a semiconductor can be used. Such known sources can be a pulsed solid state laser, a chopped continuous wave laser, a pulsed electron beam and a pulsed ion beam, etc.

The system optionally includes a pulse duration extender 214 that is used to control the temporal profile of the laser pulses. Optional mirror 204 can be used to direct the laser beam into extended 214, in which case mirror 206 would be removed. Since crystal growth can be a function of the duration of the laser pulse used to irradiate the film, pulse duration extender 214 can be used to lengthen the duration of each laser pulse to achieve a desired pulse duration. Methods of extending pulse durations are known.

Slit 220 can be used to control the spatial profile of the laser beam. Specifically, it is used to give the beam a high aspect ratio profile. The laser beam from source 202 may have a Gaussian profile, for example. Slit 220 significantly narrows one spatial dimension of the beam. For example, before slit 220, the beam may be between 10 and 15 mm wide and 10 to 30 mm long. The slit could be substantially thinner than the width, for example about 300 microns wide, which results in a laser pulse that has a short axis of about 300 microns, and a long axis that may be unmodified by the slit. Slit 220 is a simple method of producing a narrow beam from a relatively wide beam, and also has the benefit of providing a ‘top hat’ spatial profile, which has a relatively uniform energy density across the short axis. In another embodiment, instead of using slit 220, a very short focal length lens can be used to tightly focus one dimension of a laser beam onto the silicon film. It is also possible to focus the beam onto the slit 220; or, more generally, using optical elements (e.g., a simple cylindrical lens) to narrow the short axis of the beam from source 202 so that less energy is lost upon passing slit 220 yet some sharpening is achieved.

The laser beam is then modified using two fused silica cylindrical lenses 220, 222. The first lens 220, which is a negative focal length lens, expands the size of the long axis of the beam, the profile of which may be relatively uniform, or may have gradual changes that are not apparent over the length of the long axis. The second lens 222 is a positive focal length lens that reduces the size of the short axis. The projection optics reduce the size of the laser beam in at least the short dimension, which increases the fluence of the laser pulse when it irradiates the film. The projection optics may be a multiple-optic system that reduces the size of the laser beam in at least the short dimension by a factor of 10-30×, for example. The projection optics may also be used to correct for spatial aberrations in the laser pulses, for example, spherical aberrations. In general, the combination of slit 220, lenses 220, 222, and the projection optics is used to ensure that each laser pulse irradiates the film with an energy density that is high enough to melt the film, with a homogeneity and length along the long axis that is sufficiently long to minimize or eliminate variations of the crystallization of the film. Thus, for example, a 300 micron wide beam is reduced to, for example, a 10 micron width. Narrower widths are also contemplated. Homogenizers may also be used on the short axis.

In some embodiments, the line scan crystallization system 200 can include a variable attenuator and/or a homogenizer, which can be used to improve the spatial homogeneity along the long axis of the laser beam. The variable attenuator can have a dynamic range capable of adjusting the energy density of the generated laser beam pulses. The homogenizer can consist of one or two pairs of lens arrays (two lens arrays for each beam axis) that are capable of generating a laser beam pulses that have uniform energy density profiles.

The line scan crystallization system is configured to create a long and narrow laser beam that measures, for example, about 4-15 μm on the short axis and can be 50-100 microns on the long axis in some embodiments, and tens of centimeters or up to more than one meter on the long axis in other embodiments. In general the aspect ratio of the beam is high enough that the irradiated region can be considered a “line.” The length to width aspect ratio may be in the range of about 50 up to about 1×10⁵ or more, for example. In one or more embodiments, the width of the short axis does not exceed the width of twice the characteristic lateral growth length of the laterally solidified crystals, so that no nucleated polysilicon is formed between the two laterally grown areas. This is useful for the growth of “uniform” crystals and also for the general improvement of crystal quality. The desired length of the long axis of the laser beam may be dictated by the size of the substrate, and the long axis may extend substantially along the entire length of the substrate, or of the display to be fabricated (or a multitude thereof), or of a single TFT device in the display, or a TFT circuit on the periphery of the display (e.g., containing drivers) or in other words the integration area. The beam length can in fact also be dictated by the dimension of the integration areas of two adjacent displays combined. In this way, the entire thin film (or a driver circuitry) may be crystallized in preferably one pass of the line beam. The energy density, or fluence, uniformity along the length of the beam is preferably uniform and for example varies by no more than 5% along its entire length. In other embodiments, the energy density along the length of the beam covering the length of interest is of a sufficiently low value that no agglomeration occurs in either one or as a result of a series of overlapping pulses. Agglomeration is a result of localized high energy density that can lead to film disruption.

In some embodiments, the process employs a high frequency, high power pulsed laser source. The high power laser provides sufficient energy per pulse to provide adequate energy density across the length of an irradiated region that the pulse may melt a film within that region. The higher frequency permits a film to be scanned or translated relative to the irradiated region at a rate that can be used in commercially practical applications. In one or more embodiments, the laser source is capable of a pulse frequency of greater than about 1 kHz, or up to about 9 kHz. In other embodiments, the laser source is capable of a pulse frequency of up to 100 kHz or more, which is a range made possible by pulsed solid-state lasers.

The described system can be used to create, for example, “directional” and/or “uniform” crystalline films. High throughput rates can be obtained with a high repetition laser, for example, a 4 kHz 600 W laser in a system creating a 1 m×6 μm size laser line beam with an optical efficiency of 30% leading to a 750 mJ/cm² energy density. The resultant line beam can crystallize a film at a rate of 40-80 cm²/s when stepping 1-2 μm to create a “directional” crystalline silicon film, and 160-200 cm²/s when stepping at 4-5 μm to create a “uniform” crystalline silicon film.

The laser source has a low divergence, meaning that it is easy to focus in a small spot. For example, the laser source is capable of focusing to ˜100 μm, or even down to ˜10 μm. The smaller focus size increases the efficiency of the system because the lateral growth length, and not the beam width, dictates the step size. Since a 1 μm translation step size is used in some applications, finer focusing is clearly beneficial. A wide beam causes an increase of pulses per unit area and thereby a commensurate degradation of the material, e.g., through increased surface roughening or incorporation of impurities from the ambient or possibly from the buffer material.

The system may include optics to provide a tightly focused beam to reduce the size of the short axis of the beam. In general, masking the beam with a slit or mask is not required to obtain long axis irradiation patterns suitable for use in one or more embodiments of the present invention. However, masks or slits may be used to obtain beam patterns of a desired profile. In particular, a mask or slit helps to create a top-hat spatial profile rather than a Gaussian profile, so that the energy density across the beam is more uniform. A ‘top hat’ profile is preferred for lateral growth, because the “sharper” image leads to a better defined melt-pool with more abrupt edges and lateral growth can proceed immediately. With a Gaussian profile, melting regions may be relatively wide, and potentially only partially melt a portion of the irradiated region, which can slow the lateral growth of crystals. Additionally, pulse-to-pulse energy density fluctuations may lead to variation of the width of the molten region when a Gaussian profile is used, which can lead to a variation in the pulse-to-pulse overlapping causing non uniformities in the laterally grown grains. Also, with a top-hat profile, the heat is evenly distributed in the molten region and therefore can be maximized throughout in order to delay the cooling process and thereby increasing the lateral growth. With a Gaussian beam, maximum heating can only be reached in the center of the irradiate area and as a result, overall less heat is deposited.

Exemplary masks include a slit with appropriate slit spacing, e.g., width and length. The mask can be fabricated from a quartz substrate and includes a metallic or dielectric coating that is etched by conventional techniques to form a mask having features of any shape or dimension. The length of the mask features is chosen to be commensurate with the dimensions of the device that is to be fabricated on the substrate surface. The width of the mask also may be variable depending on the desired features of the irradiated film. In some embodiments it is chosen to be small enough to avoid small grain nucleation within the melt zone, yet large enough to maximize lateral crystalline growth for each laser pulse. The desired dimensions of the mask feature will also depend upon the characteristics of the other optics in the system. By way of example only, the mask feature can generate a beam image at the sample with a long axis of about 10 to 100 cm, and a short axis of about 2 to 10 microns, or about 4-6 microns.

A proximity mask, such as a straight opaque edge, may be used to improve the beam profile. The straight edge reduces the beam width and steepens the beam profile, both of which serve to improve the melt and lateral growth of the crystal grains. The edge of the mask or slit feature may be rough, i.e., not smooth. The edge of the mask or proximity mask deviates from being perfectly straight. The edge roughness can be, for example, a saw tooth or serrated pattern having a pattern frequency of about 3 μm to 50 μm or more. The effect of the edge roughness is that the irradiation pattern forms an undulating non-planar melt interface. When the front is not planar, the grains located near a region of negative curvature tend to grow wider as grain boundaries diverge. Conversely grains located on a region of positive curvature will converge and be consumed. The effect of such curvature is to form more parallel grains in the direction of lateral growth. The width of the parallel grain can be defined by the periodicity of the edge roughness.

Display devices using organic light emitting elements have been developed, which can be fabricated on the crystalline films described herein. The methods described herein can provide crystalline films that have a semiconductor grain structure that varies by less than about 5% along the length of a display device. In a typical active matrix organic light emitting diode (AM-OLED) display, organic emitter layers are sandwiched between two electrodes, and electric energy is transformed into light through the excitation of the organic molecules. A display device in which a pixel is composed of organic light emitting elements is self-luminous and, unlike liquid crystal displays, does not require an independent light source as a backlight. Light-emitting devices have large emitting areas and high levels of brightness. Therefore, AM-OLED displays provide display devices of reduced weight and thickness.

FIG. 12 is a cross-sectional illustration of a conventional active matrix display that uses an organic light emitting element. Substrate 300 is transmissive of light. An organic light emitting element 313 includes a pixel electrode 303, an organic compound layer 304, and an opposite electrode 305. The pixel electrode of the organic light emitting element is in contact with the top face of an interlayer insulating film 302, with inner walls of a contact hole that pierces the interlayer insulating film to reach control circuit 301. The pixel electrode is also in contact with the top of the control circuit. Control circuit 301 is composed of at least TFTs, and can be composed of one switching TFT and one current controlling TFT. The two TFT configuration is the simplest, but more complex circuitry may be used. The switching TFT switches between conductive and non-conductive in accordance with the output of the driving circuit. The current controlling TFT is applied a voltage according to an output of a driving circuit to the pixel electrode 303 so that a current flows between the opposite electrode and the pixel electrode. The intensity of light emitted from the organic compound layer 304 is dependent upon the amount of current flowing between the pixel electrode and the opposite electrode.

Pixel control circuits in AM-OLEDs operate in a different mode than pixel control circuits in AM-LCDs. In AM-LCD pixel control circuits, the TFTs operate as simple switching devices that open or close the pixel for data and thus require only a uniform threshold voltage for reliable operation. By contrast, the pixel TFTs in AM-OLEDs actually provide the current for light emission. Therefore, an additional high degree of uniformity of carrier mobility is required. In practice, therefore, the pixel brightness in AM-OLEDs is much more sensitive to the microstructure of semiconductor crystals in the TFT than in AM-LCDs. It is preferred that a ˜4% grain size uniformity is used in OLED applications as opposed to a ˜10% grain size uniformity for LCD applications.

While there have been shown and described examples of the present invention, it will be readily apparent to those skilled in the art that various changes and modifications may be made therein without departing from the scope of the invention as defined by the appended claims. Accordingly, the invention is limited only by the following claims and equivalents thereto. 

What is claimed is:
 1. A system for preparing a semiconductor film for an active matrix display, the system comprising: a laser source providing laser pulses having a pulse frequency of greater than about 4 kHz and having an average power of greater than 100 W; laser optics that shape the laser beam into a line beam, the line beam having a length, a width and a length to width aspect ratio greater than 50, the shaped laser beam having a substantially uniform fluence along the length of the line beam; a stage for support a sample capable of translation in at least one direction; memory for storing a set of instructions, the instructions comprising: (a) irradiating a first region of the film with a first laser pulse to form a first molten zone, said first molten zone demonstrating a variation in width along its length to thereby define a maximum width (W_(max)) and a minimum width (W_(min)), wherein the first molten zone crystallizes upon cooling to form one or more laterally grown crystals wherein the crystals grow substantially perpendicular to the length of the line beam; (b) laterally displacing the film relative to the line beam in the direction of lateral crystal growth a distance that is greater than about one-half W_(max) and less than W_(min); and (c) irradiating a second region of the film with a second laser pulse to form a second molten zone having a shape that is substantially the same as the shape of the first molten zone, wherein the second molten zone crystallizes upon cooling to form one or more laterally grown crystals that are elongations of the one or more crystals in the first region, wherein laser optics are selected to provide W_(max) less than 2×W_(min).
 2. The system of claim 1, wherein the line beam is positioned at an angle relative to a position intended for a column of TFTs.
 3. The system of claim 1, wherein the line beam is positioned at an angle relative to an edge of the substrate.
 4. The system of claim 1, wherein the laser is a solid state laser.
 5. The system of claim 1, wherein the laser is a excimer laser.
 6. A system for preparing a semiconductor film for an active matrix display, the system comprising: a laser source providing laser pulses having a pulse frequency of greater than about 4 kHz and having an average power of greater than 100 W; laser optics that shape the laser beam into an line beam, the line beam having a length, a width and a length to width aspect ratio greater than 50, the shaped laser beam having a substantially uniform fluence along the length of the line beam; a stage for support a sample capable of translation in at least one direction; memory for storing a set of instructions, the instructions comprising: (a) irradiating a first portion of the film with a plurality of laser pulses, wherein the irradiated film crystallizes after each laser pulse to form one or more laterally grown crystals, wherein the crystals grow substantially perpendicular to the length of the line beam, and wherein the film is laterally displaced relative to the line beam at a constant velocity a first pulse translation distance in the direction of lateral crystal growth after a first laser pulse, to form a first crystalline region; and (b) without interruption of the film displacement relative to the line beam and in the direction of the lateral crystal growth, irradiating a second portion of the film with a plurality of laser pulses, wherein the irradiated film crystallizes after each laser pulse to form one or more laterally grown crystals and wherein the film is laterally displaced relative to the line beam at a constant velocity a second pulse translation distance in the direction of lateral crystal growth after each laser pulse, to form a second crystalline region, wherein said first pulse translation distance after said first laser pulse is different from said second pulse translation distance after said second laser pulse.
 7. The system of claim 6, wherein the first and second pulse translation distances are achieved by varying the film velocity at a constant laser pulse rate.
 8. The system of claim 6, wherein the predetermined width of the line beam is selected to avoid nucleation in a film region irradiation with the irradiation pattern.
 9. The system of claim 6, wherein the first pulse translation distance is selected to provide columns of laterally grown crystals having location controlled grain boundaries that interrupt lateral crystal growth and are substantially perpendicular to the direction of lateral growth.
 10. The system of claim 6, wherein each laser pulse forms a molten zone and the first pulse translation distance is greater than one-half the width of the molten zone and less than the width of the molten zone.
 11. The system of claim 10, wherein said molten zone demonstrates a variation in width along its length to thereby define a maximum width (W_(max)) and a minimum width (W_(min)), and the first pulse translation distance is greater than about one-half W_(max) and less than W_(min).
 12. The system of claim 6, wherein the second pulse translation distance is selected to provide laterally grown crystals extending substantially in the direction of film movement.
 13. The system of claim 6, wherein each laser pulse forms a molten zone and the second pulse translation distance is less than one-half the width of the molten zone.
 14. The system of claim 6, wherein each laser pulse forms a molten zone and the first pulse translation distance is greater than one-half the width of the molten zone and less than the width of the molten zone and the second pulse translation distance is greater than one-half the width of the molten zone and less than the width of the molten zone.
 15. The system of claim 6, wherein the first pulse translation distance is selected to provide a first set of predetermined crystalline properties suitable for a channel region of a pixel TFT.
 16. The system of claim 15, wherein the second pulse translation distance is selected to provide a second set of predetermined crystalline properties suitable for a channel region of an integration TFT.
 17. The system of claim 16, wherein the second portion is wide enough to accommodate a pair of integration regions for two adjacent displays.
 18. The system of claim 6, wherein the laser pulse is focused into a line beam using cylindrical optics. 